FSI Titan Spray System

FSI Titan Spray System

Price: 750 000 CZK

In stock: 2

SKU: 299

formulář

Description

LIMITED QUANTITY IN STOCK FOR ONLY 19,999 USD

All-in-one high capacity wet processing equipment upgraded for demands of the 21st century.

Configuration

  • PFA high purity pneumatic operated valve
  • No metal contamination
  • Four cassetes for 6“ wafers (100 wafers per run)

Optionals

  • 15“ Touchscreen LCD Display
  • PLC controller
  • In-line ultrapure DI water heater
  • Canister console
  • Recirculation tank for HF / BOE
  • Chamber Temperature Measurement
  • Computer network support
  • SECSII/GEM support
  • built-in ozone generator

Features and Benefits

  • Reduced DI water consumption
  • Savings of Chemicals
  • Low effluent and Disposal Costs
  • High Process Reliability
  • Small Footprint
  • Safe operation
  • Reliable operation

Process availability

  • B clean
  • C clean
  • RCA clean
  • SC1 clean
  • SC2 clean
  • Oxide etch
  • Ozone clean
  • Piranha clean
  • Rinse and Dry


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