Automatic Wet Bench System

Automatic Wet Bench System

Price: Not Announced

In stock: 0

SKU: 216541984



Chemical boxes intended for the production of semiconductor wafers up to 300 mm in diameter. Fully automatic transfer of wafers in the technological process. Automatic filling of etching basths. Resistivity  easurements in rinsing baths. Special baths for multiple processes in one tank.

Features and Benefits

  • Fully robotic handling
  • Multiple baths within one system
  • User-friendly HMI interface


  • Touchscreen LCD display
  • PLC controller
  • PFA high purity pneumatic operated valve
  • No metal contamination
  • Standard 4-bath system


  • Computer network support
  • SECSII/GEM support
  • Various number of baths
  • Special baths for multiple processes
  • Measurements of resistivity

Additional Information

Weight 500kg
Length 200cm
Width 200cm
Height 120cm